Coupling apparatus for chemical fluid flow channel

ABSTRACT

A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of patent application Ser. No.13/108,909 filed May 16, 2011 now U.S. Pat. No. 8,544,500 which claimspriority of Japanese Patent Application No. 2010-114814 filed on May 18,2010, Japanese Patent Application No. 2010-114815 filed on May 18, 2010,and Japanese Patent Application No. 2011-95815 filed on Apr. 22, 2011,all of which are hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a flow channel structure, and moreparticularly to a coupling structure of flow channels that conveychemical liquid utilized in a semiconductor fabrication process andother production processes.

2. Description of the Related Art

Semiconductor fabrication devices use various chemical liquid, forexample, HMDS liquid. The HMDS liquid is fed by a pump to a vaporizervia a chemical liquid flow channel such as a pipe or a manifold. Thechemical liquid flow channel is sometimes required to be decoupled, forexample, to perform the maintenance of the semiconductor fabricationdevice. The related art techniques used for such decoupling aredescribed in Japanese Patent Application Publications No. 2007-292217and No. 2008-85504.

However, the problem is that chemical liquid leaks (includingvaporization) to the outside from the disconnected portion when thechemical liquid flow channel is decoupled.

SUMMARY OF THE INVENTION

Accordingly, an object of the present invention is to solve at least apart of the aforementioned problems described above with a technique forreducing the leak of chemical liquid in decoupling of chemical liquidflow channels.

The above and other object of the present invention are attained atleast partly by a chemical liquid circuit apparatus including a maincircuit member, a sub-circuit member, and a frame member. A main circuitmember has a chemical liquid channel for flowing a chemical fluid, and amain opening formed on an end of the chemical liquid channel. Thesub-circuit member is mounted on and in contact with the main circuitmember such that a first load is applied to the main circuit member. Thesub-circuit member has a sealing surface for sealing the main openingfrom outside of the chemical liquid circuit apparatus. The frame memberhas a storing portion for storing the main circuit member, and aconnecting opening disposed in a position connecting to the main openingof the main circuit member stored in the storing portion. The framemember has such a shape that a reaction force of the first load istransferred from the storing portion to the main circuit member.

The storing portion may includes a mounting portion mounted on thesub-circuit member, and a support member having a contact surface facingthe mounting portion, the contact surface transferring the load to themain circuit member, and may further include an insert opening forinserting the main circuit member along the contact surface so as toinstall the main circuit member in the storing portion.

The main circuit member may include a valve body having a plurality ofchemical liquid channels, and the sub-circuit member may include a valvemember actuator having a valve member configured to switch channels byopening and blocking mutual communications between the plurality ofchemical liquid channels.

The plurality of chemical liquid channels may include a first flowchannel, a second flow channel, and a first valve member chamberprovided in a position for connecting the first flow channel and thesecond flow channel.

The valve member actuator may include a first valve member and a secondvalve member. The first valve member is provided inside the first valvemember chamber and configured to block the communications between thefirst flow channel and the first valve member chamber by closing a firstopening connected to the first flow channel, the first opening beingformed on an inner wall surface of the first valve member chamber. Thesecond valve member is configured to block the communications betweenthe second flow channel and the first valve member chamber by closing asecond opening connected to the second flow channel, the second openingbeing formed in the inner wall surface of the first valve memberchamber.

The second flow channel may include a second valve member chamber, and acoupling flow channel for connecting the second valve member chamber andthe second opening. The first valve member may be configured to performopening/closing operations within the first valve member chamber. Thesecond valve member may be configured to perform opening/closingoperations within the second valve member chamber, the second valvemember having such a shape that the second opening is closed when thesecond valve member is inserted into the coupling flow channel.

The chemical liquid circuit may include a plurality of second flowchannels and a corresponding plurality of second valve members. Thefirst valve member may be a diaphragm valve member including a diaphragmmembrane portion having a circumferential edge portion fixed to thevalve body, and a protruding portion provided in a center of thediaphragm membrane portion and configured to open and close the firstopening. The plurality of second flow channels may be formed anddisposed so as to have respective openings in an annular portion formedby partitioning by the diagraph membrane portion in the first valvemember chamber.

In addition, the sub-circuit member may include a state quantity sensorconfigured to sense a state quantity of the chemical fluid flowing inthe main opening. The sub-circuit member may include a state controllerconfigured to control a state quantity of the chemical fluid flowing inthe main opening.

The frame member may include a plurality of storing portions, where eachof the plurality of storing portions stores corresponding one of maincircuit members. The sub-circuit member may include a joint channelconnecting the main openings of the main circuit members stored in thestoring portions.

The present invention can realized not only in the form of the chemicalliquid flow channel coupling device, but also, for example, in the formof a control method for coupling and decoupling chemical liquid flowchannels, a computer program that realizes this method, and a programmedium.

These and other object, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the preferred embodiments with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view illustrating the internal flow channelsof a chemical liquid flow channel coupling apparatus 11 according to thefirst embodiment;

FIG. 2 is a perspective view illustrating a chemical liquid flow channelcoupling unit 10 constituting the chemical liquid flow channel couplingapparatus 11;

FIG. 3 is an exploded perspective view illustrating constituent parts ofthe chemical liquid flow channel coupling unit 10;

FIG. 4 is a cross-sectional view illustrating a chemical liquidcirculation state of the chemical liquid flow channel coupling units 10,10 a;

FIG. 5 is a cross-sectional view illustrating a chemical liquid purgingstate of the chemical liquid flow channel coupling units 10, 10 a;

FIG. 6 is a cross-sectional view illustrating a state after the chemicalliquid purging of the chemical liquid flow channel coupling units 10, 10a;

FIG. 7 is a cross-sectional view illustrating the disconnection state ofthe coupling units 10, 10 a;

FIG. 8 is a perspective view illustrating a chemical liquid flow channelcoupling apparatus 11 a of the first variation example;

FIG. 9 is a flow channel circuit diagram of a chemical liquid flowchannel coupling apparatus 11 b of the second variation example;

FIG. 10 is a cross-sectional view illustrating the internal flow channelof the chemical liquid flow channel switching apparatus 100 of thesecond embodiment;

FIG. 11 is a cross-sectional view illustrating the internal flow channelof the chemical liquid flow channel switching apparatus 100;

FIG. 12 is an exploded perspective view illustrating the constituentcomponents of the chemical liquid flow channel switching apparatus 100;

FIG. 13 is a cross-sectional view illustrating the flow state of thefirst chemical liquid in the chemical liquid flow channel switchingapparatus 100;

FIG. 14 is a cross-sectional view illustrating the flow state of thesecond chemical liquid in the chemical liquid flow channel switchingapparatus 100;

FIG. 15 is a perspective view illustrating a constitution of flow meter100 a of the third embodiment;

FIG. 16 is a cross-sectional view illustrating a constitution of flowmeter 100 a of the third embodiment;

FIG. 17 is a frame format illustrating constitutions of chemical fluidchannel switching valve 160 and chemical fluid tank 197 of the fourthEmbodiment;

FIG. 18 is an enlarged view illustrating a constitution of chemicalfluid channel switching valve 160 in chemical fluid supply mode;

FIG. 19 is a flowchart showing an operation (mode switching) of chemicalfluid filling by the chemical fluid channel switching valve 160;

FIG. 20 is an enlarged view illustrating chemical fluid channelswitching valve 160 in purge mode;

FIG. 21 is an enlarged view illustrating chemical fluid channelswitching valve 160 in detachable mode;

FIG. 22 is a perspective view illustrating a valve unit 10 d of avariation example;

FIG. 23 is an exploded perspective view illustrating the constituentcomponents of the valve unit 10 d of a variation example;

FIG. 24 is a cross-sectional view illustrating the internal flow channelof a variation example; and

FIG. 25 is a cross-sectional view illustrating the constituentcomponents of the internal flow channel of the variation example.

DESCRIPTION OF THE EMBODIMENTS

The embodiments of the present invention will be described below withreference to the appended drawings.

(A. Constitution and Operation of Chemical Liquid Flow Channel CouplingApparatus of the First Embodiment)

FIG. 1 is a cross-sectional view illustrating the internal flow channelsof the chemical liquid flow channel coupling apparatus 11 according tothe first embodiment. FIG. 2 is a perspective view illustrating thechemical liquid flow channel coupling unit 10 constituting the chemicalliquid flow channel coupling apparatus 11. FIG. 3 is an explodedperspective view illustrating constituent parts of the chemical liquidflow channel coupling unit 10. The chemical liquid flow channel couplingapparatus 11 is provided with two chemical liquid flow channel couplingunits 10, 10 a and a joining member 12 mechanically coupling the twochemical liquid flow channel coupling units. The chemical liquid flowchannel coupling units 10, 10 a, individually function as flow channelswitching valve members and are also referred to as coupling units. Thecoupling unit 10 a and the coupling unit 10 are also referred to as thefirst coupling unit and the second coupling unit.

The chemical liquid flow channel coupling apparatus 11 makes it possibleto couple and decouple chemical liquid flow channels by performingcoupling and decoupling between the upstream chemical liquid flowchannel coupling units 10 that supplies chemical liquid from chemicalliquid supply pipe 91 a and the downstream chemical liquid flow channelcoupling units 10 a that supplies the chemical liquid to a purge gassupply pipe 92 a. The chemical liquid flow channel coupling apparatus 11is further provided with the below-described flow channel forcirculating a purge gas that serves to discharge the chemical liquidfrom the internal flow channels of the chemical liquid flow channelcoupling apparatus 11 and leak the chemical liquid when the flowchannels are decoupled.

The joining member 12 is rotatably mounted on a hinge 24 of the couplingunit 10 and engaged with a hinge 24 a of the coupling unit 10 a, therebycoupling the two coupling units 10, 10 a with each other. The joiningmember 12 is shown in the figure to illustrate schematically theprinciple of bringing a pair of coupling surfaces 37, 37 a into contactand joining, while applying a load thereto, and this joining member doesnot represent the actual coupling mechanism. The coupling surface 37 andthe coupling surface 37 a will be also referred to as a first couplingsurface and a second coupling surface, respectively.

As shown in FIG. 2 and FIG. 3, the coupling unit 10 has a valve body 30made from a fluororesin and having an inner flow channel formed therein,two valve member actuators 40, 50 that enable or disable thecommunication via the inner flow channel, and a frame member 20 forassembling the two valve member actuators 40, 50 with the valve body 30.In the present embodiment, the coupling unit 10 a has a constitutionidentical to that of the coupling unit 10. The valve body 30 is alsoreferred to as main circuit member. The valve member actuators 40, 50are also referred to as sub-circuit member.

The valve member actuator 50 is a functional component that is mademainly of vinyl chloride and enables or disables the communication viathe inner flow channel by actuating the valve member with operation air.The valve member actuator 50 is provided with a diaphragm valve member52 that enables or disables the communication via the flow channel, apiston 53 that drives the diaphragm valve member 52, a pressure chamber54 that applies a drive force to the piston 53 in the direction ofenabling the communication via the flow channel, a spring 56 thatapplies to the piston 53 an impelling force in the opposite direction,and an adaptor 51 that supplies the operation air to the pressurechamber 54. The diaphragm valve member 52 has a protruding portion 52 bhaving a round columnar shape and enabling or disabling thecommunication via the flow channel and an annular sealing portion 52 sformed around the protruding portion 52 b. The diaphragm valve member 52corresponds to the diaphragm membrane. The diaphragm valve member 52 maybe made from a fluororesin of the same type as that of the valve body30.

The valve body 30 has formed therein a chemical liquid flow channel 34connected to a chemical liquid receiving pipe 91 that receives thechemical liquid, a chemical liquid valve member chamber 38 communicatingwith the chemical liquid flow channel 34 via an opening 32 c, and acoupling flow channel 33 communicating with the chemical liquid valvemember chamber 38. The chemical liquid circulation path includes thecoupling flow channel 33, the chemical liquid valve member chamber 38,and the chemical liquid flow channel 34 in the order of description. Thechemical liquid valve member chamber 38 has an inner wall surface 38 sformed in the valve body 30 and a sealing surface 32 s and is tightlyclosed by intimate contact of the sealing surface 32 s and a sealingportion 52 s of the diaphragm valve member 52. The chemical liquid valvemember chamber 38 is configured such that the communication between thechemical liquid valve member chamber 38 and the chemical liquid flowchannel 34 is enabled or disabled when the opening 32 c is opened orclosed by the protruding portion 52 b by the operation of the diaphragmvalve member 52. The chemical liquid valve member chamber 38 is alsoreferred to as main opening.

The valve body 30 a has formed therein a chemical liquid flow channel 34a connected to a chemical liquid receiving pipe 91 a that receives thechemical liquid, a chemical liquid valve member chamber 38 acommunicating with the chemical liquid flow channel 34 a, and a couplingflow channel 33 a communicating with the chemical liquid valve memberchamber 38 a. The chemical liquid circulation path includes the chemicalliquid flow channel 34 a, the chemical liquid valve member chamber 38 a,and the coupling flow channel 33 a in the order of description. In thechemical liquid valve member chamber 38 a, the communication between thechemical liquid valve member chamber 38 a and the chemical liquid flowchannel 34 a is enabled or disabled by the inner wall surface 38 asformed in the valve body 30 and the diaphragm valve member 52 a.

The chemical liquid valve member chamber 38 a and the chemical liquidvalve member chamber 38 are also referred to as the first chemicalliquid valve member chamber and the second chemical liquid valve memberchamber, respectively. Further, the valve body 30 a and valve body 30are also referred to as the first valve body and the second valve body,respectively. The inner wall surface 38 as and the inner wall surface 38s are also referred to as the first inner wall surface and the secondinner wall surface, respectively. The opening of the chemical liquidflow channel 34 a communicating with the chemical liquid valve memberchamber 38 a is also referred to as the first chemical liquid opening,and the opening of the chemical liquid flow path 34 communicating withthe chemical liquid valve member chamber 38 is also referred to as thesecond chemical liquid opening. The coupling flow channel 33 a and thecoupling flow channel 33 are also referred to as the first coupling flowchannel and the second coupling flow channel, respectively.

The chemical liquid circulation flow channel of the chemical liquid flowchannel coupling apparatus 11 is described below. The chemical liquid issupplied from the chemical liquid supply pipe 91 a and can be suppliedto the chemical liquid receiving pipe 91 via the chemical liquid flowchannel 34 a, the chemical liquid valve chamber 38 a, and the couplingflow channel 33 a of the coupling unit 10 a and the coupling flowchannel 33, chemical liquid valve chamber 38, and chemical liquid flowchannel 34 of the coupling unit 10 in the order of description. Thepresent flow channel is configured such that the chemical liquid flowsfrom bottom to top, the gravity force direction G being the referencedirection, and includes no portions in which the chemical liquid flowsfrom top to bottom.

The switching constitution that enables and disables the communicationin the chemical liquid flow channel coupling apparatus 11 will bedescribed below. The coupling unit 10 a can block the flow channel fromthe chemical liquid supply pipe 91 a in the chemical liquid valvechamber 38 a. The coupling unit 10 can block the flow channel to thechemical liquid receiving pipe 91 in the chemical liquid valve chamber38. As a result, the chemical liquid flow channel coupling apparatus 11can block the flow channel in the chemical liquid valve chamber 38 andthe chemical liquid valve chamber 38 a. Therefore, even if the flowchannel between the coupling flow channel 33 a and the coupling flowchannel 33 is disconnected, the chemical liquid is prevented fromleaking from the chemical liquid supply pipe 91 a and the chemicalliquid receiving pipe 91. The chemical liquid valve chamber 38 is alsoreferred to as main opening.

Further, the chemical liquid flow channel coupling apparatus 11 has afunction of purging the chemical liquid from the chemical liquid flowchannel having the above-described constitution. The purging function isrealized by the internal flow channels for purging of two valve bodies30, 30 a and two valve member actuators 40, 40 a.

The valve member actuator 40 is a functional component that actuates thevalve member by operation air to enable and disable the communication ofthe purge gas flow channel. In the present embodiment, this valve memberactuator is configured in the same manner as the valve member actuator50. The valve member actuator 40 is provided with the diaphragm valvemember 42, piston 43, pressure chamber 44, and adaptor 41. The diaphragmvalve member 42 is made from a fluororesin and has the protrudingportion 42 b and the sealing portion 42 s.

A purge gas flow channel 35 connected to the purge gas discharge pipe 92for discharging the purge gas, a purge gas valve chamber 39communicating with the purge gas flow channel 35, and a connection flowchannel 36 a communicating with the purge gas valve chamber 39 and thechemical liquid valve chamber 38 are formed as a purge gas flow channelin the valve body 30. The purge gas valve chamber 39 is tightly closedwhen the sealing surface 31 s and the sealing portion 42 s of thediaphragm valve member 42 are abutted against each other. In the purgegas valve chamber 39, the communication between the purge gas flowchannel 35 and the connection flow channel 36 communicating with thechemical liquid valve chamber 38 is enabled and disabled by thediaphragm valve member 42. Recesses 31, 32 of shapes such that the valvemember actuators 40, 50 can be respectively fitted therein are formed inthe valve body 30. The chemical liquid valve chamber 38 and the purgegas valve chamber 39 are disposed in the deepest portions of therecesses 31, 32, respectively. The chemical liquid valve chamber 38 andthe purge gas valve chamber 39 are formed by mounting the valve memberactuators 40, 50 on the recesses 31, 32, respectively.

A purge gas flow channel 35 a connected to the purge gas supply pipe 92a for supplying the purge gas, a purge gas valve chamber 39 acommunicating with the purge gas flow channel 35 a, and a connectionflow channel 36 communicating with the purge gas valve chamber 39 a andthe chemical liquid valve chamber 38 a are formed as a purge gas flowchannel in the valve body 30 a. In the purge gas valve chamber 39 a, thecommunication between the purge gas flow channel 35 a and the connectionflow channel 36 a communicating with the chemical liquid valve chamber38 a is enabled and disabled by the diaphragm valve member 42 a.

The flow channel of the purge gas in the chemical liquid flow channelcoupling apparatus 11 will be described below. The purge gas suppliedfrom the purge gas supply pipe 92 a can be successively supplied to thepurge gas discharge pipe 92 via the purge gas flow channel 35 a,connection flow channel 36 a, chemical liquid valve chamber 38 a,coupling flow channel 33 a, coupling flow channel 33, chemical liquidvalve chamber 38, connection flow channel 36 a, and purge gas flowchannel 35 in the order of description. As a result, the chemical liquidcan be discharged from the connection flow channel 36 a, chemical liquidvalve chamber 38 a, coupling flow channel 33 a, coupling flow channel33, chemical liquid valve chamber 38, and connection flow channel 36 aby the purge gas in a state in which the flow channel from the chemicalliquid supply pipe 91 a is blocked in the chemical liquid valve chamber38 a and the flow channel to the chemical liquid receiving pipe 91 isblocked in the chemical liquid valve chamber 38.

The connection states of each flow channel to the chemical liquid valvechambers 38, 38 a will be described below. The chemical liquid valvechamber 38 a is connected to the connection flow channel 36 a at thelowest position and connected to the coupling flow channel 33 a at thehighest position, the gravity force direction G being the referencedirection. The chemical liquid valve chamber 38 is connected to thecoupling flow channel 33 at the lowest position and connected to theconnection flow channel 36 at the highest position, the gravity forcedirection G being the reference direction.

Further, in the chemical liquid flow channel coupling apparatus 11 ofthe first embodiment, each of the valve member actuators 40, 40 a, 50,50 a is mounted on the valve bodies 30, 30 a by contact, while applyinga load (contact load) thereto. The valve member actuator 40 is passedthrough a fitting hole 21 of the frame member 20, and in this state fourscrews S are tightened in screw holes 29 of the frame member 20. As aresult, the valve member actuator 40 is fitted in the recess 31 of thevalve body 30 and mounted by bringing the sealing surface 32 s and thesealing portion 42 s of the diaphragm valve member 42 into contact witheach other. The valve member actuator 50 is similarly passed through thefitting hole 22 of the frame member 20 and mounted by fitting into therecess 32 of the valve body 30. The number of screws S is preferablyequal to or greater than four.

Key grooves 25, 28 are respectively formed in two fitting holes 21, 22of the frame member 20. The key grooves 25, 28 serve to constrain thevalve member actuators 40, 50 directionally and determine theorientation during assembling. Further, a notched portion 23 is formedas a notch rather than a through hole to enable the mounting of acoupling member 18 in which the coupling surface 37 of the valve body 30has been formed. As a result, the frame member 20 can be disposed aroundthe coupling member 18 and therefore the tightening load of the joiningmember 12 can smoothly flow to the valve body 30.

The valve member actuator 50 a and the valve member actuator 50 are alsoreferred to as a first chemical liquid control valve and a secondchemical liquid control valve. The load applied by the valve memberactuators 40 a, 50 a to the valve body 30 a are also referred to as afirst load. The load applied by the valve member actuators 40, 50 to thevalve body 30 are also referred to as a second load.

According to the present mounting method, the reaction force of thecontact load can be transmitted to the valve body 30 through the innerwall surface 26 and the inner wall surface 27 of the frame member 20 orexample, when the valve member actuator 50 and the valve member actuator40 of the coupling unit 10 are mounted. The valve member actuators 40,40 a, 50, 50 a are joined to the valve bodies 30, 30 a by tightening thefour respective screws S in the screw holes 29. The aforementionedcontact load can be adjusted by the tightening torque. The screw holes29 correspond to mounting portions.

The inventors have also analyzed properties of a structural bodycomposed of dissimilar materials that included the valve bodies 30, 30 aconstituted by an organic material such as a fluororesin, the valvemember actuators 40, 40 a, 50, 50 a constituted by an organic materialsuch as polyvinyl chloride, and the frame member 20 constituted by amaterial such as a metal of a PEEK (polyetheretherketone) resin. Theanalysis of properties was conducted from the standpoint of thermalstresses, plastic deformation, and modulus of longitudinal elasticity.

The thermal stressed analysis is described below. For example, where ametal material is used for the frame member 20, the frame member 20 hasa linear thermal expansion coefficient lower than that obtained with thevalve bodies 30, 30 a and the valve member actuators 40, 40 a, 50, 50 aconstituted by organic materials. Therefore, under a high-temperatureenvironment, the surface pressure on the seal surface (for example, aconstant surface of the sealing surface 32 s and the sealing portion 42s) is increased by thermal expansion of the valve body 30 and the likeand the valve member actuator 40 and the like. The resultantadvantageous property is that sealing ability is not decreased by theincrease in temperature.

Further, the organic material, such as a fluororesin, constituting thevalve bodies 30, 30 a and the valve member actuators 40, 40 a, 50, 50 aprovides the degree of freedom in design by making it possible to adjustthe linear thermal expansion coefficient by filling the organic materialwith glass fibers or mixing with a reinforcing material such as glassfibers.

The plastic deformation analysis is described below. The organicmaterial, such as a fluororesin, constituting the valve bodies 30, 30 ahas high resistance to volume strains but can be easily plasticallydeformed (shape deformation). The analysis conducted by the inventorshas predicted that, for example, in the conventional constitution(Japanese Patent Application Publication No. 2007-292217), thermalstresses induced in the nut insertion portion change the round holeshape of the insertion portion into elliptical, thereby creating gapsand play. For example, because of the gap and play, the fluid can leakor functional components can fall out.

In the present embodiment, the periphery of the valve bodies 30, 30 a isconstrained by surrounding the valve bodies 30, 30 a with the frame body20. Therefore, the degree of freedom of plastic deformation isrestricted. Thus, it is clear that the structure in which the valvebodies 30, 30 a are surrounded by the frame member 20 increasesresistance to plastic deformation. As mentioned hereinabove, an organicmaterial such as a fluororesin is resistant to volume strains. Theinventors have confirmed that the aforementioned problems associatedwith gaps or play does not occur due to tightening between the framemember 20 and valve member actuators 40, 40 a, 50, 50 a and frame member20 constituted by an organic material such as a polyvinyl chloride.

The analysis for modulus of longitudinal elasticity is described below.The valve member actuators 40, 40 a, 50, 50 a constituted by an organicmaterial such as polyvinyl chloride has a high modulus of elasticity anda high mechanical strength and can be strongly tightened with the framemember 20. By contrast, when the valve member actuators 40, 40 a, 50, 50a and valve bodies 30, 30 a are tightened, elastic deformation iscreated at the contact surface of the sealing surface 32 s of the valvebody 30 made from a fluororesin and the sealing portion 42 s of thediaphragm valve member 42.

By setting the appropriate correlation between the dimensions of theframe member 20 and the valve bodies 30, 30 a, it is possible to realizestable setting of the amount of this elastic deformation that does notdepend too much on the tightening force. More specifically, by settingthe valve bodies 30, 30 a to a somewhat larger size, it is possible toadjust (set) the amount of elastic deformation so as to induce thepreset elastic deformation. As a result, it is possible to adjust thesurface pressure between the sealing surface 32 s and the sealingportion 42 s that is determined by the elastic deformation anddemonstrate good sealing performance.

Thus, the constituent components can be reliably tightened and the fluidcan be prevented from leaking by effectively using the properties ofmaterials and the structural aspect of the valve bodies 30, 30 a beingsurrounded by the frame member 20.

Further, when the valve member actuator 40 is fitted in the recess 31, afitting tolerance can be used such that takes the elastic deformation ofthe fluororesin recess 31 into account. Therefore, a simple structurecan be realized, for example, by relaxing the tolerance of positionalrelationship of the two recesses 31, 32. Furthermore, a structure suchthat acts as a buffer layer may be obtained, for example, by using forthe sealing portion 42 s of the diaphragm valve member 42 a materialwith a modulus of longitudinal elasticity lower than that of thematerial of the valve body 30. The present structure realizes astructural body in which only a compressive load is applied to the valvebody 30 and therefore high endurance can be realized.

As a result, the valve member actuator can be mounted on the valve body,without using tightening members (for example, bolts and nuts) passingthrough the valve body. As a result, a substantially linear and shortflow channel can be formed from the purge gas valve chamber 39 a to thepurge gas valve chamber 39 in the valve body 30. Furthermore, the purgeflow channel is realized in the direction from bottom to top at alltimes, that is, includes no path in the opposite direction (downwarddirection). Therefore, the purging effect can be greatly increased.

The contents of disconnection operation of the chemical liquid flowchannel coupling apparatus 11 will be described below with reference toFIG. 4 to FIG. 6.

FIG. 4 is a cross-sectional view illustrating the chemical liquidcirculation state of the chemical liquid flow channel coupling units 10,10 a. The chemical liquid circulation state is realized by communicationbetween the chemical liquid flow channel 34 a and the coupling flowchannel 33 a of the coupling unit 10 and communication between thecoupling flow channel 33 and the chemical liquid flow channel 34 of thecoupling unit 10 a. The communication of the chemical liquid flowchannel 34 a and the coupling flow channel 33 a is set by supplying theoperation air from the adaptor 51 a to the valve member actuator 50 a.The communication between the chemical liquid flow channel 34 and thecoupling flow channel 33 is set by supplying the operation air from theadaptor 51 to the valve member actuator 50.

The purge gas flow channel 35 of the coupling unit 10 is disconnectedfrom the connection flow channel 36 communicating with the chemicalliquid valve chamber 38. The purge gas flow channel 35 a is disconnectedfrom the connection flow channel 36 a communicating with the chemicalliquid valve chamber 38 a. The communication of the purge gas flowchannel 35 with the connection flow channel 36 is disabled by connectingthe discharge path to the adaptor 41 of the valve member actuator 40.The communication of the purge gas flow channel 35 a with the connectionflow channel 36 a is cut off by connecting the discharge path to theadaptor 41 of the valve member actuator 40 a.

Thus, in the chemical liquid circulation state, the chemical liquidsupplied from the chemical liquid supply pipe 91 a is supplied to thechemical liquid receiving pipe 91 via the chemical liquid flow channel34 a, chemical liquid valve chamber 38 a, coupling flow channel 33 a,coupling flow channel 33, chemical liquid valve chamber 38, and chemicalliquid flow channel 34 in the order of description. In this case, thepurge gas flow channel 35 and the purge gas flow channel 35 a are cutoff by the valve member actuators 40, 40 a from the flow channel inwhich the chemical liquid circulates.

Before the coupling units 10, 10 a are disconnected, a chemical liquidpump (not shown in the figure) is stopped and then the supply of theoperation air to all of the valve member actuators 40, 40 a, 50, 50 a isstopped. Then, a purge gas supply pump (not shown in the figure) isstarted. As a result, the coupling units 10, 10 a are cut off from thechemical liquid receiving pipe 91, chemical liquid supply pipe 91 a,purge gas discharge pipe 92, and purge gas supply pipe 92 a.

FIG. 5 is a cross-sectional view illustrating a chemical liquid purgingstate of the chemical liquid flow channel coupling units 10, 10 a. Thechemical liquid purging is a treatment in which the purge gas isintroduced in the chemical liquid flow channel and the chemical liquidis discharged from the internal flow channels of the chemical liquidflow channel coupling units 10, 10 a. In the chemical liquid purgingstate, the purge gas supplied from the purge gas supply pipe 92 a isdischarged together with the chemical liquid to the purge gas dischargepipe 92 via the purge gas flow channel 35 a, connection flow channel 36a, chemical liquid flow channel 34 a, chemical liquid valve chamber 38a, coupling flow channel 33 a, coupling flow channel 33, chemical liquidvalve chamber 38, chemical liquid flow channel 34, connection flowchannel 36, and purge gas flow channel 35 in the order of description.In the state shown in the figure, the chemical liquid is discharged fromthe chemical liquid flow channel 34 a, chemical liquid valve chamber 38a, and coupling flow channel 33 a, and the chemical liquid is dischargedfrom the coupling flow channel 33.

FIG. 6 is a cross-sectional view illustrating a state after the chemicalliquid purging of the chemical liquid flow channel coupling units 10, 10a. Pressure reduction is performed, while the purge gas flows in thesystem, after the chemical liquid has been discharged from all of theflow channels including the purge gas flow channel 35 a, connection flowchannel 36 a, chemical liquid flow channel 34 a, chemical liquid valvechamber 38 a, coupling flow channel 33 a, coupling flow channel 33,chemical liquid valve chamber 38, chemical liquid flow channel 34,connection flow channel 36, and purge gas flow channel 35. As a result,the chemical liquid that has adhered to the flow channels is vaporizedand the amount of remaining chemical liquid can be greatly reduced.

FIG. 7 is a cross-sectional view illustrating the decoupled state of thecoupling units 10, 10 a. The decoupling of the coupling units 10, 10 ais performed by rotating the joining member 12 clockwise and releasingthe engagement of the hinge 24 a. As a result, the coupling between thepair of coupling surfaces 37, 37 a is released, and the coupling flowchannel 33 and the coupling flow channel 33 a are opened to theatmosphere. Accordingly, all of the flow channels 38, 38 a, 36, 36 acommunicating with the coupling flow channel 33 and the coupling flowchannel 33 a are opened to the atmosphere. In the present embodiment,since the chemical liquid has been removed in advance from all of theflow channels 33, 33 a, 38, 38 a, 36, 36 a, the leak of the chemicalliquid to the outside caused by the decoupling of the coupling units 10,10 a can be inhibited.

The coupling of the coupling units 10, 10 a can be performed in thefollowing steps.

(1) The operator performs mechanical coupling with the joining member12.

(2) In a state in which the communication of the purge gas valve chamber39 a and the connection flow channel 36 a is cut off, the operatorcauses the purge gas valve chamber 39 to communicate with the connectionflow channel 36 and performs the evacuation of the purge gas dischargepipe 92. As a result, the pressure in the internal flow channel isreduced.

(3) The operator cuts off the communication between the purge gas valvechamber 39 and the connection flow channel 36.

(4) The operator sets the communication between the chemical liquid flowchannel 34 and the chemical liquid valve chamber 38 and also sets thecommunication between the chemical liquid flow channel 34 a and thechemical liquid valve chamber 38 a. As a result, the chemical liquid isdrawn into the flow channels.

(5) The operator can restart the circulation of the chemical liquid byactuating the chemical liquid pump (not shown in the figure).

Thus, in the chemical liquid flow channel coupling apparatus 11 of thefirst embodiment, the chemical liquid located in the short linear flowchannel leading from bottom to top can be purged effectively. Therefore,the chemical liquid can be effectively prevented from leaking duringdecoupling. Further, since the valve bodies 30, 30 a are reduced insize, the chemical liquid flow channel coupling apparatus 11 can be alsoreduced in size.

(B. Constitution and Operation of Chemical Liquid Flow Channel CouplingDevice of Variation Example of the First Embodiment)

FIG. 8 is a perspective view illustrating a chemical liquid flow channelcoupling apparatus 11 a of the first variation example. The differencebetween the chemical liquid flow channel coupling apparatus 11 a of thefirst variation example and the chemical liquid flow channel couplingapparatus 11 of the first embodiment is that the former is provided witha coupling unit 10 b having a controller 15, and a coupling unit 10 cthat is constituted to be operable by the coupling unit 10 b. Thecontroller 15 can execute automatically the above-described processingsequence by operating four valve member actuators (not shown in thefigure) incorporated in the coupling unit 10 b and the coupling unit 10c.

The coupling unit 10 b includes an operation button 16 and a LEDindicator 17 in addition to the controller 15. When it is necessary todisconnect the coupling, for example for maintenance, the operator canstart the above-described sequence by pushing the operation button 16.In the course of the processing sequence, the LED indicator 17 is redand as the processing is completed (preparation for disconnection iscompleted), the displayed light is changed to blue. The coupling unit 10b may also be configured to function so as to enable the release ofcoupling at the end of the processing sequence.

FIG. 9 is a flow channel circuit diagram of a chemical liquid flowchannel coupling apparatus 11 b of the second variation example. Aspecific feature of the chemical liquid flow channel coupling apparatus11 b is that both the purge gas discharge pipe 92 and the purge gassupply pipe 92 a are connected to either of purge gas valve chambers 39v, 39 av. With the present constitution, when the coupling units 10, 10a are coupled, the purge gas can be discharged from the purge gas valvechambers 39 v, 39 av, thereby effectively preventing the purge gas frommixing with the chemical liquid during coupling.

More specifically, where the purge gas valve chamber 39 is set to acommunication cut-off state (valve V2 is closed) and the purge gas valvechamber 39 is set to a communication cut-off state (valve V2a is closed)in a coupling state (valves V1, V1a are open) in which the chemicalliquid can be supplied to the chemical liquid valve chambers 38, 38 a,the purge gas located inside the coupling flow channel 33 can bedischarged via the purge gas valve chamber 39 by the supply of thechemical liquid. Where the valve V2 is opened and the valve V2a isclosed in a state in which the valves V1, V2 are opened, the purge gaslocated inside the coupling flow channel 33 a can be discharged via thepurge gas valve chamber 39 a by the supply of the chemical liquid.

(C. Constitution and Operation of Chemical Liquid Flow Channel CouplingApparatus of the Second Embodiment)

FIG. 10 and FIG. 11 are cross-sectional views illustrating the internalflow channel of the chemical liquid flow channel switching apparatus 100of the second embodiment. FIG. 12 is an exploded perspective viewillustrating the constituent components of the chemical liquid flowchannel switching apparatus 100. The chemical liquid flow channelswitching apparatus 100 switches flow channels of chemical liquid ofdifferent types and includes five valve member actuators 70, 70 a, 70 b,70 c, 70 d, a valve body 60, and a first frame member 80. In the presentembodiment, the different types of chemical liquid are first chemicalliquid and second chemical liquid.

The valve member actuator 70 is provided with a diaphragm valve member72, a piston 73, a pressure chamber 74, and an adaptor 71. The diaphragmvalve member 72 has a protruding portion 72 v and a sealing portion 72s. The valve member actuator 70 a is provided with a diaphragm valvemember 72 a, a piston 73 a, a pressure chamber 74 a, and an adaptor 71a. The diaphragm valve member 72 a has a sealing portion 72 as, aprotruding tip 72 ab, a tubular slanted surface 72 am, and a protrudingsurface 72 at. The roles of the tubular slanted surface 72 am and theprotruding surface 72 at will be described below. The valve memberactuators 70 b, 70 c, 70 d are configured similarly to the valve memberactuator 70 a. The valve body 60 is also referred to as main circuitmember. The valve member actuators 70 b, 70 c, and 70 d are alsoreferred to as sub-circuit member.

An inner wall surface 82 s forming a flow channel switching chamber 82together with the diaphragm valve member 72 of the valve member actuator70 is formed in the valve body 60. A first chemical liquid flow channel63 that is a flow channel for supplying the first chemical liquid to theflow channel switching chamber 82, a second chemical liquid flow channel64 that is a flow channel for supplying the second chemical liquid tothe flow channel switching chamber 82, and an outlet flow channel 61that supplies either of the first chemical liquid and the secondchemical liquid from the flow channel switching chamber 82 to theoutside communicates with the inner wall surface 82 s.

A first chemical liquid flow channel 83 that communicates with the firstchemical liquid flow channel 63, a second chemical liquid flow channel84 that communicates with the second chemical liquid flow channel 64,and an outlet flow channel 81 that comes into contact with the outletflow channel 61 when the first frame member is brought into contact withthe valve body 60 are formed in the first frame member. The first framemember 80 has a tightening portion (for example, a threaded hole) formounting the five valve member actuators 70, 70 a, 70 b, 70 c, and 70 d.

The valve body 60 is assembled with the first frame member 80 in thefollowing manner. First, the valve body 60 is mounted on an inner recess86 of the first frame member 80. Then, a second frame member 85 istightened with a screw M in the inner recess 86, while pressing thevalve body 60, which can be elastically deformed easily, against theinner recess 86. As a result, it is possible to produce a structuralbody in which the first frame member 80, the second frame member 85, andthe valve body 60 are brought into intimate contact with each other.Thus, the frame member may be configured to include a plurality ofcomponents. Where the frame member is configured to include a pluralityof components, the valve body 60 can be easily inserted by the framemember. Therefore, the degree of freedom in designing the shape of thevalve body 60 can be increased.

The five valve member actuators 70, 70 a, 70 b, 70 c, 70 d are mountedon the aforementioned structural body and gradually tightened, whilemaintaining the individual tightening forces, thereby completing theassembly of the chemical liquid flow channel switching apparatus 100. Inthe present embodiment, the mutual arrangement of the five valve memberactuators 70, 70 a, 70 b, 70 c, 70 d and the valve body 60 is regulatedby the first frame member 80. Therefore, the balance of tighteningforces can be realized regardless of the assembling method.

A valve member chamber 65 (see FIG. 10) is formed in the first chemicalliquid flow channel 63 and communicated with the flow channel switchingchamber 82 by a communication slanted hole 63 a which is a cylindricalslanted hole. A valve member chamber 66 (see FIG. 10) is formed in thesecond chemical liquid flow channel 64 and communicated with the flowchannel switching chamber 82 by a communication slanted hole 64 a whichis a cylindrical slanted hole. The flow channel switching chamber 82corresponds to the first valve member chamber. The outlet flow channels61, 81 correspond to a first flow channel. The first chemical liquidflow channel 63, first chemical liquid flow channel 83, second chemicalliquid flow channel 64, and second chemical liquid flow channel 84correspond to a second flow channel.

The opening of the outlet flow channel 61 formed in the inner wallsurface 82 s corresponds to the first opening. The openings of the firstchemical liquid flow channel 63 and the second chemical liquid flowchannel 64 formed in the inner wall surface 82 s both correspond to thesecond opening. The communication slanted hole 63 a corresponds to alinking passage. The valve member chamber 65 and the valve memberchamber 66 correspond to the second valve member chamber.

The valve member actuator 70 a can switch the communication state andcommunication cut-off state of the flow channel switching chamber 82 andthe second chemical liquid flow channel 64 by actuating the diaphragmvalve member 72 a. The valve member actuator 70 b can switch thecommunication state and communication cut-off state of the flow channelswitching chamber 82 and the second chemical liquid flow channel 64 byactuating the diaphragm valve member 72 b.

The valve member actuator 70 c can switch the communication state andcommunication cut-off state of the flow channel switching chamber 82 anda purge gas supply flow channel (not shown in the figure). The valvemember actuator 70 d can switch the communication state andcommunication cut-off state of the flow channel switching chamber 82 anda purge gas supply flow channel (not shown in the figure). The diaphragmvalve member 72 corresponds to the first valve member. The diaphragmvalve members 72 a, 72 b, 72 c, 72 d correspond to the second valvemember.

The communication cut-off state may be realized, for example, bybringing the tubular slanted surface 72 am into contact with the innersurface of the communication slanted hole 63 a or by bringing thesurface of the protruding tip 72 ab into contact with the inner wallsurface of the valve member chamber 66. In the constitution in which thecommunication is cut off by contact with the tubular slanted surface 72am, the protruding tip 72 ab may be omitted. In the constitution inwhich the communication is cut off by contact of the protruding tip 72ab, the diameter of the protruding tip 72 ab can be reduced so that gapis formed between the protruding tip and the communication slanted hole63 a. When the communication is cut off by contact of the protruding tip72 ab, for example, a projecting portion can be provided at the endsurface of the protruding tip 72 ab to increase the surface pressure andobtain a degree of freedom in creating a constitution with improvedsealing ability.

The diaphragm valve member 72 a of the present embodiment may beconfigured to be inserted into the communication slanted hole 63 a toreduce the volume of the recess communicating with the flow channelswitching chamber 82. In this case, unintended mixing of the chemicalliquid caused by switching of flow channels can be inhibited.

The valve member actuator 70 a actuates the diaphragm valve member 72 ain the valve member chamber 65 and inserts the tubular slanted surface72 am and the protruding surface 72 at into the communication slantedhole 64 a. The protruding surface 72 at is disposed at a position in thesame plane with the inner wall surface 82 s or a position in which theprotruding surface projects from the inner wall surface 82 s into theflow channel switching chamber 82. Thus, the communication of the flowchannel switching chamber 82 with the first chemical liquid flow channel63 can be cut off without forming a recess in the first chemical liquidflow channel 63. Similarly to the valve member actuator 70 a, the valvemember actuator 70 b can cut off the communication of the flow channelswitching chamber 82 with the second chemical liquid flow channel 64,and no recess is required to be formed in the second chemical liquidflow channel 64.

The communication slanted hole 63 a or the tubular slanted surface 72 amare not necessarily required to be slanted and may have anyconstitution, provided that part of the diaphragm valve member 72 a canbe inserted into the communication slanted hole 63 a, therebyeliminating the volume of the recess communicating with the flow channelswitching chamber 82. However, the advantage of obtaining a sealableconstitution by making oblique both the communication slanted hole andthe tubular slanted hole is that the unintended mixing of the chemicalliquid can be effectively inhibited. The communication slanted hole 63 acorresponds to a linking flow channel.

In the constitution according to the second embodiment, the contactloads between the five valve member actuators 70, 70 a, 70 b, 70 c, 70 dand the valve body 60 cancel each other. Thus, since the five valvemember actuators 70, 70 a, 70 b, 70 c, and 70 d are disposedsymmetrically at positions facing each other, the members correspondingto the inner wall surface 26 or inner wall surface 27 of the firstembodiment are not necessarily required.

FIG. 13 is a cross-sectional view illustrating the flow state of thefirst chemical liquid in the chemical liquid flow channel switchingapparatus 100. The flow state of the first chemical liquid is a state inwhich the valve member actuator 70 and the valve member actuator 70 bare actuated and the first chemical liquid flow channel 83 and theoutlet flow channel 81 communicate with each other. As a result, thechemical liquid flow channel switching apparatus 100 functions as avalve causing the first chemical liquid to circulate.

FIG. 14 is a cross-sectional view illustrating the flow state of thesecond chemical liquid in the chemical liquid flow channel switchingapparatus 100. The flow state of the second chemical liquid is a statein which the valve member actuator 70 and the valve member actuator 70 aare actuated and the second chemical liquid flow channel 84 and theoutlet flow channel 81 communicate with each other. As a result, thechemical liquid flow channel switching apparatus 100 functions as avalve causing the second chemical liquid to circulate.

The flow state of the first chemical liquid can be switched to the flowstate of the second chemical liquid in the following manner.

(1) The valve member actuator 70 and the valve member actuator 70 b areactuated to cut off all of the flow channels.

(2) Two valve member actuators 70 c, 70 d are actuated and the firstchemical liquid is discharged from the inside of the flow channelswitching chamber 82 by purging with the purge gas.

(3) The valve member actuator 70 and the valve member actuator 70 a areactuated to set a communication state of the second chemical liquid flowchannel 84 and the outlet flow channel 81.

Thus, in the chemical liquid flow channel switching apparatus 100according to the second embodiment, five valve member actuators 70, 70a, 70 b, 70 c, 70 d are mounted on the valve body 60 so that the valvemember actuators themselves grasp the valve body 60. Therefore, thedesign of flow channel inside the valve body 60 can be freely realized.Thus, the valve chamber formed by the valve member actuator 70 a can bedirectly communicated with the flow channel switching chamber 82 formedby the valve member actuator 70. As a result, the diaphragm valvemembers 72 a, 72 b, 72 c, 72 d of the other valve member actuators 70 a,70 b, 70 c, and 70 d are inserted into the flow channel switchingchamber 82 and the gas purging efficiency is greatly improved.

(D. Constitution and Operation of Flow Meter of the Third Embodiment)

FIG. 15 is a perspective view illustrating a constitution of flow meter100 a of the third embodiment. FIG. 16 is a cross-sectional viewillustrating a constitution of flow meter 100 a of the third embodiment.The flow meter 100 a has a measuring unit 170, two valve bodies 130, 130a, a flow channel member 140, a frame member 120, two valve memberactuators 150, 150 a, two joint channel members 110, six O-rings R.

The measuring unit 170 is an area flow meter so-called “purge meter”.The flow rate is measured by reading the position of the float F of themeasuring unit 170. The measuring unit 170 has an inflow channel 171, aconnecting channel 172, the float F, a taper tube 173, an outflowchannel 174, a chassis 179, a glass window 181, a needle 175, a sealingmember 176, an adjusting axis 177, and an adjusting knob 178.

The inflow channel 171 has an inflow opening 182 into which the fluidflows and extends horizontally. The connecting channel 172 extendsvertically and communicated with the inflow channel 171. The outflowchannel 174 has a vertical portion communicated with the taper tube 173and a horizontal portion extending horizontally with an outflow opening183. The chassis 179 has an inflow side protruding portion 184 with theinflow opening 182 and an outflow side protruding portion 185 with theoutflow opening 183.

The internal channels of the measuring unit 170 are connected asfollows. The fluid as a measurement object flows from the inflow opening182 to the inflow channel 171. The needle 175 can adjust the flow rateby adjusting the orifice diameter at the communication point of theinflow channel 171 and the connecting channel 172. The needle 175 isrotated by the adjusting knob 178 via the adjusting axis 177 and cancontrol the orifice diameter with the not shown screw connection in thechassis 179.

The taper tube 173 has an internal channel having a taper with aninternal diameter gradually widening towards to the outflow channel 174.The taper tube 173 is located such that the axis of direction is alignedto the vertical direction with the outflow channel 174 located upperside. The float F is movably inserted in the internal channel of thetaper tube 173 such that the float F moves downstream (upper side ofvertical direction) with a wider internal diameter in response to theincrease of flow rate, and the float F moves upstream (lower side ofvertical direction) with a narrower internal diameter in response to thedecrease of flow rate. The taper tube 173 enables the measurement offlow rate inside the internal channel in the taper tube 173 by readingthe position of the float F through the glass window 181.

The frame member 120 has a shape of rectangular cuboids and has a firststoring space 121, a second storing space 122, and a third storing space123 aligned in one line in the rectangular cuboids as shown in FIG. 15.Each of the first storing space 121, the second storing space 122, andthe third storing space 123 has a shape of rectangular cuboids. Each ofthe first storing space 121, the second storing space 122, and the thirdstoring space 123 has a first opening 127, a second opening 128, and athird opening 129 in the same direction, respectively. The first storingspace 121, the second storing space 122, and the third storing space 123have rectangular pillar shapes with bases of the first opening 127, thesecond opening 128, or the third opening 129, respectively.

The frame member 120 has a installation surface 185 s for installing themeasuring unit 170. The installation surface 185 s has threaded screwholes 186 to 189 for the fastening screw to install the measuring unit170 and two through-holes 184 h, 185 h. The threaded screw holes 186 to189 and the two through-holes 184 h, 185 h are communicated from theinstallation surface 185 s to the second storing space 122. Themeasuring unit 170 is installed to the frame member 120 with the inflowside protruding portion 184 and the outflow side protruding portion 185inserted into the through-hole 184 h and the through-hole 185 h,respectively as shown in FIG. 16.

The second storing space 122 is separated from the first storing space121 and the third storing space 123 with the internal wall 126 and theinternal wall 126 a, respectively. The second storing space 122 iscommunicated with the first storing space 121 and the third storingspace 123 via the through-hole 124 running through the internal wall 126and via the through-hole 125 running through the internal wall 126 a,respectively.

The first storing space 121 has a through-hole 121 w having a commonaxis with the through-hole 124. The third storing space 123 has athrough-hole 123 w having a common axis with the through-hole 125. Thethrough-hole 121 w and through-hole 123 w are through-holes forinserting a drill (not shown) for drilling the through-hole 124 and thethrough-hole 125.

The first storing space 121, the second storing space 122, and the thirdstoring space 123 store the first valve body 130, the second valve body130 a, and the flow channel member 140, respectively. Each of the firstvalve body 130, the second valve body 130 a, and the flow channel member140 has a shape of rectangular pillar which fits to the first opening127, the second opening 128, and the third opening 129, respectively.

With this structure, the first valve body 130, the second valve body 130a, and the flow channel member 140 can be inserted through the firstopening 127, the second opening 128, and the third opening 129 smoothlyand stored in the first storing space 121, the second storing space 122,and the third storing space 123, respectively

The flow channel member 140 has two internal channels 142, 145. Theinternal channel 142 has two openings 141, 143 and connects each other.

The internal channel 145 has two openings 144, 146 and connects eachother. The flow channel member 140 is located at a position where theopening 143 and the opening 144 are communicated to the inflow opening182 and the outflow opening 183 of the measuring unit 170, respectively.

The measuring unit 170 is installed when the flow channel member 140 ispositioned as described above inside the second storing space 122 of theframe member 120. The measuring unit 170 is installed by inserting theinflow side protruding portion 184 and the outflow side protrudingportion 185 into the through-hole 184 h and the through-holes 185 h,respectively with each O-ring R provided in the through-hole 184 h andthe through-holes 185 h, respectively. This installation is accomplishedwith fastening members (not shown) which run through the fourthrough-holes 180 of the measuring unit 170 and screwed in the threadedscrew holes 186 to 189.

With this structure, the inflow opening 182 and the outflow opening 183of the measuring unit 170 are communicated with the opening 143 and theopening 144 of the flow channel member 140 via O-rings R, respectively.On the other hand, the flow channel member 140 is pressed against theinternal contact surface 128 p which forms a part of internal wall ofthe second storing space 122 via O-ring R. In other words, the flowchannel member 140 is held between the inflow side protruding portion184, the outflow side protruding portion 185, and the internal contactsurface 128 p via O-rings R.

The first valve body 130 has two chemical fluid channels 131, 132 andthe chemical fluid valve chamber 138 communicated with the two chemicalfluid channels 131, 132. The diaphragm valve member 152 is installedinside of the chemical fluid valve chamber 138. The diaphragm valvemember 152 is driven to switch enable or disable a mutual communicationof the two chemical fluid channels 131, 132. The chemical fluid channel132 communicates with the internal channel (not shown) of the resinjoint 133 (see FIG. 15). The chemical fluid channel 131 communicateswith the internal channel 145 of the flow channel member 140 via theinternal channel 111 of the joint channel member 110 and two O-rings.

The second valve body 130 a has two chemical fluid channel 131 a, 132 aand the chemical fluid valve chamber 138 a communicated with the twochemical fluid channel 131 a, 132 a. The diaphragm valve member 152 isinstalled inside of the chemical fluid valve chamber 138 a. Thediaphragm valve member 152 is driven to switch enable or disable amutual communication of the two chemical fluid channels 131 a, 132 a.The chemical fluid channel 132 a communicates with the internal channel(not shown) of the resin joint 133 a. The chemical fluid channel 131 acommunicates with the internal channel 142 of the flow channel member140 via the internal channel 111 of the joint channel member 110 and twoO-rings R.

The valve member actuator 150 has a similar structure as the valvemember actuator 50. The valve member actuator 150 has a diaphragm valvemember 152, a piston 153 which drives the diaphragm valve member 152, apressure chamber 155, and a spring 154. The pressure chamber 155 appliesa drive force to the piston 153 in the direction to disable the mutualcommunication of the internal channel. The spring 154 press the piston153 in the reverse direction of the pressure chamber 155. The valvemember actuator 150 a has the same structure as the valve memberactuator 150. The valve member actuators 150, 150 a have similarstructures as the valve member actuators 50 and constitute shutoffvalves with the first valve body 130 and the second valve body 130 a.

The first storing space 121, the second storing space 122, and the thirdstoring space 123 are located in alignment with an axis direction of thejoint channel member 110. Thus, two O-rings provided at the ends of eachof the two joint channel members 110 press the first valve body 130 andthe second valve body 130 a to move apart each other. The second valvebody 130 a is pressed against the internal contact surface 123 p whichforms a part of internal wall of the third storing space 123. The firstvalve body 130 is pressed against the internal contact surface (notshown) which forms a part of internal wall of the first storing space121.

With this structure, the joint channel member 110 and sealing elasticmember (e.g. O-ring R) implement the mutual communications of themembers 130, 130 a, 140 by pressing the members 130, 130 a, 140 storedin the plurality of storing spaces 121 to 123 of the frame member 120,respectively. The joint channel member 110 and sealing elastic member(e.g. O-ring R) function to fix the members 130, 130 a, 140 inside theplurality of storing spaces 121 to 123 of the frame member 120.

The frame member 120 is configured to have the plurality of storingspaces 121 to 123 as described above. In this kind of structure with theplurality of storing spaces 121 to 123, it is possible to form thethrough-holes 124, 125 and connect the internal channels with the jointchannel member 110 and sealing elastic member (e.g. O-ring R) inside thethrough-hole 124, 125. Additionally, the measuring unit 170 which is afunctional device is installed outside of the frame member 120, which iseasily detached for maintenance.

This embodiment enables the change of direction of the resin joint 133,133 a by exchanging the first valve body 130 and/or the second valvebody 130 a with other valve bodies. This realizes easy changes ofexternal connection points.

Additionally, the first valve body 130, the second valve body 130 a, andthe flow channel member 140 are connected with the joint channel member110 each other. It saves space because these connections areaccomplished without the resin joint parts connections. The valve body130, 130 a are also referred to as a main circuit member. The valvemember actuator 150 is also referred to as a sub-circuit member.

(E. Constitution and Operation of Switching Valve of the FourthEmbodiment)

FIG. 17 is a frame format illustrating constitutions of chemical fluidchannel switching valve 160 and chemical fluid tank 197 of the FourthEmbodiment. The chemical fluid switching valve 160 is equipped with thechemical fluid tank 197. The chemical fluid switching valve 160 switchesthe channel for the chemical fluid supply to the chemical fluid usingapparatus 200 or the chemical fluid refill to the chemical fluid tank197.

The chemical fluid switching valve 160 is connected to the chemicalfluid using apparatus 200 via the channel pipes 191, 198 equipped withthe shutoff valves MV1, MV2, respectively. The chemical fluid usingapparatus 200 and the chemical fluid switching valve 160 are connectedand separated at the dashed line S between the shutoff valves MV1, MV2and chemical fluid switching valve 160.

The chemical fluid switching valve 160 has the frame member 196, fiveshutoff valves AV1 to AV5 installed to the frame member 196, four jointchannel member 110 with O-rings, and the joint equipped channel pipes192 to 195. Each of five shutoff valves AV1 to AV5 has a each of fivevalve bodies BV1 to BV5 and the valve member actuator 150, respectively.

The frame member 196 has openings for inserting five valve bodies BV1 toBV5 and five storing spaces, each of which has a shapes of rectangularpillar with the shape of openings as the base of the pillar. The framemember 196 has pillar member 196 a and pillar member 196 b jointed withthe pillar member 196 a. The pillar members 196 a, 196 b have horseshoeshapes as the base of their pillar. The pillar member 196 a has threestoring spaces at the direction of three o'clock, six o'clock, and nineo'clock. Two storing spaces are formed between the pillar member 196 aand the pillar member 196 b. The joint method may be made with screws orby welding (not shown). The frame member 196 may be made of metal orresin material with enough strength for strong acid as chemical fluid,for example.

Each outside wall of five storing spaces has a through-hole forinserting a part of each of five valve member actuators 150. The outsidewalls are dividing walls which divides the external direction and eachstoring space in the direction perpendicular to the axis of a pillarshape of the frame member 196.

Each of five valve bodies BV1 to BV5 is inserted in each of five storingspaces of the frame member 196. Five valve bodies BV1 to BV5 are fixedby four joint channel members 110 and five valve member actuators 150 inthe each storing space of the frame member 196. The internal channels offive valve bodies BV1 to BV5 are connected each other with four jointchannel members 110, forming the internal channels of the chemical fluidswitching valve 160.

The joint equipped channel pipes 192 to 195 are installed to the framemember 196. The joint equipped channel pipe 193 is inserted in thechemical fluid tank 197 with its opening located above the fluid levelof chemical fluid in the chemical fluid tank 197. The joint equippedchannel pipe 194 is inserted in the chemical fluid tank 197 with itsopening located below the fluid level of chemical fluid. With thisstructure, it is possible to supply the chemical fluid from the jointequipped channel pipe 194 by injecting nitrogen gas into the jointequipped channel pipe 193.

Two shutoff valves AV1, AV2 operates enable or disable of thecommunication from the joint equipped channel pipe 192 to the jointequipped channel pipes 193 for providing nitrogen gas. Two shutoffvalves AV3, AV4 operates enable or disable of the communication from thejoint equipped channel pipe 194 to the joint equipped channel pipe 195for providing the chemical fluid. The shutoff valve AV5 operates enableor disable of the communication of a bypass channel 199 that connectsthe nitrogen channel and the chemical fluid channel.

FIG. 18 is an enlarged view illustrating a constitution of chemicalfluid channel switching valve 160 in chemical fluid supply mode. Thejoint equipped channel pipes 192 to 195 have flanges 192 f to 195 f thatradically flare at their ends. Each of the flanges 192 f to 195 f areinstalled in each of annular grooves 192 h to 195 h formed in the framemember 196. The annular groove 192 h is located in the frame member 196away from the annular groove 193 h in the height direction of pillarshape of the frame member 196 or “height wise-shifted location” from theannular groove 193 h. The annular groove 194 h is located in the framemember 196 away from the annular groove 195 h in the height direction ofpillar shape of the frame member 196 or “height wise-shifted location”from the annular groove 195 h.

The frame member 196 has a through-hole (not shown) formed along theaxis direction of the annular groove 192 h. The joint equipped channelpipe 192 with the flange 192 f is installed with the O-ring R using thethrough-hole. The through-hole is formed in the height wise-shiftedlocation from the annular groove 193 h. The frame member 196 has othersimilar through-holes (not shown) located in the height wise-shiftedlocation each other, for the joint equipped channel pipes 193 to 195.

Three valve bodies BV1, BV3, BV5 have common constitutions. Two valvebodies BV2, BV4 have common constitutions. Two valve bodies BV2, BV4 aredifferent from three valve bodies BV1, BV3, BV5 in that connectingchannels 199 a are additionally formed in the two valve bodies BV2, BV4.Two valve bodies BV2, BV4 and three valve bodies BV1, BV3, BV5 havecommon constitutions except the connecting channels 199 a. Accordingly,Two valve bodies BV2, BV4 can be fabricated just by adding “hole makingprocess” to form the connecting channels 199 a in the three valve bodiesBV1, BV3, BV5.

FIG. 19 is a flowchart showing an operation (mode switching) of chemicalfluid filling by the chemical fluid channel switching valve 160. At thestep S11, the chemical fluid switching valve 160 is set to the chemicalfluid supply mode. The chemical fluid supply mode is a state to allow asupply of the chemical fluid to the chemical fluid using apparatus 200.In the use state of chemical fluid, four shutoff valves AV1 to AV4 areoperated to open state and one shutoff valve AV5 is operated to closestate as shown in FIG. 18.

In this operation state, the nitrogen gas can be brought to the chemicalfluid tank 197 via two shutoff valves AV1, AV2 in open state and thechannel pipe 191, and the chemical fluid can be brought to the channelpipe 198 from the chemical fluid tank 19 via two shutoff valves AV3, AV4in open state. Meanwhile, the shutoff valve AV5 close the bypass channel199 connected between the channel pipe 191 and the channel pipe 198.

At the step S12, the chemical fluid switching valve 160 is set to thepurge mode. The purge mode is an operation state for purging theresidual chemical fluid in the internal channels of the chemical fluidswitching valve 160 as shown in FIG. 20. In the purge mode, the chemicalfluid tank 197 is sealed by setting shutoff valves AV2, AV4 to closestate, and the shutoff valve AV5 is set to open state with two shutoffvalves AV1, AV3 kept in open state. With this constitution, it ispossible to purge the chemical fluid from the internal channel of thechemical fluid switching valve 160 by injecting the nitrogen gas withthe chemical fluid tank 197 kept sealed.

At the step S13, the chemical fluid switching valve 160 is set to thedetachable mode. The detachable mode is an operation state for detachingthe chemical fluid switching valve 160 from the chemical fluid usingapparatus 200 as shown in FIG. 21. The chemical fluid using apparatus200 is detached at the downstream or “the chemical fluid tank 197 side”of the two shutoff valve MV1, MV2. The detachable mode is an operationstate to seal the internal channels of the chemical fluid switchingvalve 160 off from the outside, with all of the shutoff valves AV1 toAV5 in close state by setting the shutoff valves AV1, AV3, and AV5 toclose state.

The chemical fluid switching valve 160 can be connected to a chemicalfluid supply apparatus (not shown) in the detachable mode. Theconnection to the chemical fluid supply apparatus can be implementedwith the same constitution for the connection to the chemical fluidusing apparatus 200.

At the step 14, the chemical fluid switching valve 160 is set to thefilling mode. The filling mode is the same operation mode as thechemical fluid supply mode (see FIG. 18). In this operation mode, thefluid flows in reverse direction of the chemical fluid supply mode. Inother words, the chemical fluid is brought to the chemical fluid tank197 via the two shutoff valves AV3, AV4 in open state and the nitrogengas is discharged from the chemical fluid tank 197 via the two shutoffvalves AV1, AV2 in open state. Meanwhile, the shutoff valve AV5 closesthe bypass channel 199 connected between the channel pipe 191 and thechannel pipe 198.

At the step S15, the chemical fluid switching valve 160 is set to thepurge mode again or reset to the purge mode. This purge mode is the sameoperation state as the purge mode of step S12 (see FIG. 20) and is theoperation state to allow the purge of the chemical fluid from theinternal channel of the chemical fluid switching valve 160. In thisstate, the purge is performed. When the purge is completed, theoperation advances to step S16.

At the step S16, the chemical fluid switching valve 160 is reset to thedetachable mode. The detachable mode is the same operation state as thedetachable mode of step S13 (see FIG. 21) and is the operation state toallow the detachment of the chemical fluid switching valve 160 from thechemical fluid supply apparatus (not shown) and the connection to thechemical fluid using apparatus 200.

At the step S17, the chemical fluid switching valve 160 is reset to thechemical fluid supply mode. With this constitution, the chemical fluidtank 197 can restart the supply of the chemical fluid to the chemicalfluid using apparatus 200 from the chemical fluid tank 197 filled withthe chemical fluid.

Accordingly, the chemical fluid switching valve 160 can fill thechemical fluid with the chemical fluid tank 197 kept sealed such thatthe chemical fluid is sealed off from the air. Additionally, thisembodiment implemented the chemical fluid switching valve 160 with thesimple constitution of five efficiently equipped shutoff valves AV1 toAV5.

In these above mentioned embodiments, the main circuit member (e.g.valve body and flow channel member) and the sub-circuit member (e.g.valve member actuator) are connected each other, without using metallicscrew passing through the main circuit member. The inventor found thatthe chemical fluid of strong acid sinks in the resin material little bylittle with a long time and corrodes metallic screws close to thechannel if the permeable resin material such as PTFE is fastened withthe metallic screws. In the above mentioned embodiments, these kinds ofcorrosions are prevented because the metallic screws do not passingthrough or even contact the resin body.

(F. Other Preferred Constitutions)

The first constitution may be implemented by a chemical fluid flowchannel coupling apparatus that couples and decouples chemical fluidflow channels. The coupling apparatus includes: a first coupling unit;and a second coupling unit. The first coupling unit includes: a firstchemical fluid flow channel configured to flow the chemical fluid; afirst coupling flow channel having a first coupling surface; a purgingfluid supply flow channel for supplying a fluid for purging; a firstchemical fluid valve member chamber being communicated with the firstchemical fluid flow channel, the first coupling flow channel, and thepurging fluid supply flow channel; a first valve member configured toopen and close a first chemical fluid opening, the first chemical fluidopening being formed in a first inner wall surface of the first chemicalfluid valve member chamber, the first chemical fluid opening beingcommunicated with the first chemical fluid flow channel; and a purgingfluid supply control valve configured to open and close the purgingfluid supply flow channel. The second coupling unit includes: a secondchemical fluid flow channel configured to flow the chemical fluid; asecond coupling flow channel having a second coupling surface configuredto allow a coupling and a decoupling to the first coupling surface; apurging fluid discharge flow channel configured to discharge the fluidfor purging; a second chemical fluid valve member chamber beingcommunicated with the second chemical fluid flow channel, the secondcoupling flow channel, and the purging fluid discharge flow channel; asecond valve member configured to open and close a second chemical fluidopening, the second chemical fluid opening being formed in a secondinner wall surface of the second chemical fluid valve member chamber,the second chemical fluid opening being connected to the second chemicalfluid flow channel; and a purging fluid discharge control valveconfigured to open and close the purging fluid supply flow channel.

With this constitution, the communication of the first chemical liquidflow channel and the first chemical liquid valve member chamber can beopened and closed by the first valve member in the first chemical liquidopening formed in the inner wall surface of the first chemical liquidvalve member chamber. As a result, in a state in which the firstchemical liquid flow channel is isolated, the purging fluid can becaused to flow into the first coupling flow channel and the firstchemical liquid valve member chamber and the chemical liquid can bedischarged from the flow channel. The purging fluid supply flow channelcan be opened and closed by the purging fluid supply control valve.Therefore, the first coupling flow channel can be operated to assume astate of connection only to the flow channel from which the chemicalliquid has been discharged by the purging fluid in a decoupled state.

The second coupling unit has a constitution similar to that of the firstcoupling unit. Therefore, the second coupling flow channel of the secondcoupling unit can be also operated so as to be connected only to theflow channel from which the chemical liquid has been discharged by thepurging fluid in a decoupled state. As a result, the leak of thechemical liquid in a decoupled state of the chemical liquid flow channelcan be inhibited. The purging fluid may flow from the first couplingunit side to the second coupling unit or from the second coupling unitside to the first coupling unit.

The second constitution is modified in the first constitution asfollows. The fluid for purging is a scavenging gas. The second couplingunit is disposed above the first coupling unit, with the gravity forcedirection being used as a reference direction. The first chemical fluidopening is disposed at a position higher than a first opening and lowerthan an second opening, the first opening being formed in the firstinner wall surface and communicated with the purging fluid supply flowchannel, the second opening being formed in the first inner wall surfaceand communicated with the first coupling flow channel, with the gravityforce direction being used as a reference direction, and the secondchemical fluid opening is disposed at a position higher than a thirdopening and lower than a fourth opening, the third opening being formedin the second inner wall surface and communicated with the secondcoupling flow channel, the fourth opening being formed in the secondinner wall surface and communicated with the purging fluid dischargeflow channel, with the gravity force direction being used as a referencedirection.

With this constitution, the scavenging gas can flow in the openingleading from the purging fluid supply flow channel to the first innerwall opening, the first chemical liquid opening, the opening of thefirst inner wall surface leading to the first coupling flow channel, theopening leading from the first coupling surface, the second couplingsurface, and the second coupling flow channel to the second inner wallsurface, the second chemical liquid opening, and the opening of thesecond inner wall surface leading to the purging fluid discharge flowchannel in the order of description. As a result, the liquid chemicalliquid can be thoroughly discharged by the scavenging gas from bottom totop and a smooth discharge of the liquid chemical liquid can berealized.

The third constitution is modified in the first or second constitutionsas follows. The first coupling unit further includes: a first valve bodyincluding the purging fluid supply flow channel, the first chemicalfluid flow channel, and the first coupling flow channel; a firstchemical fluid control valve having the first valve member, the firstchemical fluid control valve and the purging fluid supply control valvebeing installed on the first valve body and contacting on the firstvalve body in each direction with a first load being applied to thefirst valve body; and a first frame member mounted on the first chemicalfluid control valve and the purging fluid supply control valve, thefirst frame member having a shape such that a reaction force of thefirst load in each direction is transmitted from the outside of thevalve body to the valve body. The second coupling unit further includes:a second valve body including the purging fluid supply flow channel, thesecond chemical fluid flow channel, and the second coupling flowchannel, a second chemical fluid control valve having the second valvemember, the second chemical fluid control valve and the purging fluidsupply control valve being installed on the second valve body andcontacting on the second valve body in each direction with a second loadbeing applied to the first valve body; a second chemical fluid controlvalve having the second valve member, the second chemical fluid controlvalve and the purging fluid supply control valve being installed on thesecond valve body and contacting on the second valve body in eachdirection with a second load being applied to the second valve body.

With this constitution, the chemical liquid flow channel couplingapparatus is constituted by the valve body and a valve member actuator,and the valve member actuator is mounted by using the frame memberhaving a shape such that the reaction force of the contact load istransmitted from the outside of the valve body to the valve body. As aresult, the inner flow channel of the chemical liquid flow channelcoupling apparatus can be easily reduced in size and linearized. Sincethe valve member actuator can be mounted on the valve body, withoutusing tightening members (for example, bolts and nut) passing throughthe valve body, the presence of the tightening member is not an obstacleand a plurality of chemical liquid flow channels for chemical liquidcirculation can be formed in the valve body.

The invention may be implemented as the fourth constitution below. Achemical liquid circuit apparatus includes: a main circuit member havinga chemical liquid channel for flowing a chemical fluid and a mainopening formed on an end of the chemical liquid channel; a sub-circuitmember having a sealing surface for sealing the main opening fromoutside of the chemical liquid circuit apparatus, the sub-circuit memberbeing installed on the main circuit member and contacting on maincircuit member with a first load being applied to main circuit member;and a frame member having a storing space for storing the main circuitmember and a connecting opening disposed in a position for connectingthe main opening of the main circuit member stored in the storing space,the frame member having a shape such that a reaction force of the firstload is transmitted from the storing space to the main circuit member.

With this constitution, the sub-circuit member (e.g. valve memberactuator) is mounted by using the frame member having a shape such thatthe reaction force of the contact load is transmitted from the outsideof the main circuit member (e.g. valve body) to the main circuit member.Therefore, the sub-circuit member can be mounted on the main circuitmember, without using tightening members (for example, bolts and nuts)passing through the main circuit member. As a result, no obstacle iscreated by the presence of the tightening member, and a plurality ofchemical liquid flow channels for chemical liquid circulation can beformed in the main circuit member.

The fifth constitution is modified in the fourth constitution asfollows. The storing space includes: a mounting portion mounted on thesub-circuit member; and a support member having a contact surface facingthe mounting portion, the contact surface transmitting the load to themain circuit member.

With this constitution, the sub-circuit member (e.g. valve memberactuator) is mounted on the sub-circuit member by using the supportmember having a contact surface that faces the mounting portion of thesub-circuit member and transmits the load to the sub-circuit member.Therefore, the sub-circuit member can be mounted even in the case inwhich, for example, the sub-circuit member is mounted as a single uniton the sub-circuit member. When a plurality of the sub-circuit membersare mounted, for example, at positions on both sides of the sub-circuitmember, the frame member may be constituted such as to apply a load tothe plurality of sub-circuit members, this load bringing the sub-circuitmembers close to each other.

The sixth constitution is modified in the fifth constitution as follows.The storing space includes an insert opening for inserting the maincircuit member along the contact surface in order to install the maincircuit member in the storing space.

With the sixth constitution, the insert opening for inserting the maincircuit member along the contact surface is provided. Therefore, it ispossible to insert the main circuit member into the storing space alongthe contact surface and to fix the main circuit member in the storingspace keeping a contact on the contact surface after the insert.

The seventh constitution is modified in the sixth constitution asfollows. The main circuit member has a valve body including a pluralityof chemical liquid channel. The sub-circuit member has a valve memberactuator including a valve member configured to switch enable or disablea mutual communication of the plurality of chemical liquid channel.

With the seventh constitution, the valve body including a plurality ofchemical liquid channel is provided in the main circuit member, and thevalve member configured to switch enable or disable a mutualcommunication of the plurality of chemical liquid channel is provided inthe sub-circuit member. Therefore, it makes easy to fabricate the flowchannel switching valve.

The eighth constitution is modified in the seventh constitution asfollows. The plurality of chemical liquid flow channels include a firstflow channel, a second flow channel, and a first valve member chamberthat communicates the first flow channel and the second flow channel.The valve member actuator has: a first valve member provided inside thefirst valve member chamber and disables the communication between thefirst flow channel and the first valve member chamber by closing a firstopening, the first opening being formed in the inner wall surface of thefirst valve member chamber and being connected to the first flowchannel, and a second valve member configured to disable thecommunication between the second flow channel and the first valve memberchamber by closing a second opening, the second opening being formed inthe inner wall surface of the first valve member chamber and beingconnected to the second flow channel.

With the sixth constitutions, the first opening and the second openingformed in the first valve member chamber can be closed. Therefore, thechemical liquid can be prevented from remaining in the flow channelconnected to the first valve body chamber. As a result, for example, theunintended mixing of chemical liquid when the flow channels are switchedcan be prevented.

The ninth constitution is modified in the eighth constitution asfollows. The second flow channel has a second valve body chamber and acoupling flow channel connecting the second valve body chamber and thesecond opening. The first valve member is provided in a state of beingable to open or close inside the first valve body chamber. The secondvalve member is provided in a state of being able to open or closeinside the second valve body chamber and has a shape such that thesecond opening is closed when the second valve member is inserted intothe coupling flow channel.

With the ninth constitution, it is possible to use only one valve memberoperating inside the first valve member chamber and therefore theconstitution can be realized by selecting the appropriate flow channelarrangement. In addition since the second valve member has a shape suchthat the second opening is closed when the second valve member isinserted into the coupling flow channel, the volume of a concave portionwhich communicates with the first valve member chamber and in which thechemical liquid remains can be greatly reduced. As a result, theunintended mixing of chemical liquid during switched can be effectivelyinhibited.

The tenth constitution is modified in the ninth constitution as follows.The tenth constitution is provided with a plurality of sets of thesecond flow channel and the second valve member.

With the tenth constitution, the second valve member and the second flowchannel communicating with the opening in the inner wall surface of thefirst valve member chamber are provided in a plurality of sets.Therefore, the constitution of each set can be used for an applicationsuch as switching of chemical liquid or purging during switching.

The eleventh constitution is modified in the ninth or tenth constitutionas follows. The first valve member is a diaphragm valve member having adiaphragm membrane portion with a circumferential edge portion fixed tothe valve body, and a protruding portion provided in the center of thediaphragm membrane portion to open and close the first opening, and thesecond flow channel is formed and disposed in a state of being open ineach annular portion formed by partitioning by the diagraph membraneportion in the first valve member chamber.

With the eleventh constitution, a plurality of openings can be formed byefficiently using the shape of the valve chamber formed by the diaphragmmembrane portion.

The twelfth constitution is modified in the fourth or fifth constitutionas follows. The sub-circuit member has a state quantity sensorconfigured to sense a state quantity of the chemical fluid flowing inthe main opening.

The thirteenth constitution is modified in the fourth or fifthconstitution as follows. The sub-circuit member has a state controllerconfigured to control a state quantity of the chemical fluid flowing inthe main opening.

With the twelfth or thirteenth constitution, the sub-circuit member thatis more easily detachable than main circuit member has the statequantity sensor and/or the state controller. This constitutionfacilitates maintenance of the state quantity sensor and/or the statecontroller. The state quantity sensor is a flow meter or a thermometer,for example. The state controller is a pressure controller or a flowcontroller, for example.

The fourteenth constitution is modified in one of the fourth to twelfthconstitution as follows. The frame member has a plurality of the storingspace, each of the plurality of storing space storing each of the maincircuit members. The sub-circuit member includes a joint channelconnecting the main openings of main circuit members stored in thestoring spaces.

With the fourteenth constitution, each of the main circuit members arestored in the each of the storing space, and the sub-circuit memberincludes a joint channel connecting the main openings of main circuitmembers. Therefore, it allows simple and easy design of chemical fluidhaving the plurality of main circuit member.

(G. Variations)

The present invention is not limited to the above-described embodimentsand can be also carried out in the following manner.

(1) In the above-described embodiments, the present invention isrealized as a device having a function of cutting off or switching theflow channels. However, the present invention may be also realizedsimply as a valve performing ON/OFF switching or opening adjustment, asa valve unit 10 d shown by way of example in FIG. 22, FIG. 23, FIG. 24,and FIG. 25. The valve unit 10 d has a single valve member actuator 40,a valve body 96, and a frame member 95 and performs ON/OFF switching andopening adjustment between two chemical liquid flow channels 93, 94.

The merit of applying the present invention to such a valve unit is thatthe valve unit can be miniaturized and manufactured in a simpler manner.With such a constitution, a plurality of chemical liquid flow channelsrepresent a broad concept including also, for example, theaforementioned chemical liquid flow channels 93, 94.

(2) In the second embodiment, it is not always necessary to use theframe member as a constituent element. The specific feature of thesecond embodiment is that the opening formed in a valve chamber wherethe valve member operates is opened and closed by another valve member.Therefore, the method for mounting the valve member actuator on thevalve body is not limiting. In addition, the flow channel for purgingfluid is also not necessary. A total of at least three or more flowchannels that can be set to communicate or cut off from communicationmay be connected and the number of valve member actuators may be five ormore.

(3) In the above-described embodiments, the chemical liquid isdischarged from the flow channel by purging with a purge gas, but thechemical liquid may be also discharged by using a liquid. Generally, achemical liquid may be discharged by purging with a fluid. The valvemember actuator 40 a and the valve member actuator 40 are also referredto as the purging fluid supply control valve and the purging fluiddischarge control valve, respectively. The connection flow channel 36 aand the connection flow channel 36 are also referred to as the purgingfluid supply flow channel and the purging fluid discharge flow channel,respectively.

(4) In the above-described embodiment, a HMDS chemical liquid for asemiconductor fabrication device is described by way of example as thechemical liquid, but chemical liquid of other types may be also used andliquids of other types may also be used.

(5) In the above-described embodiment, the plurality of storing spaceare located in a perpendicular to a direction of axis of frame memberwhich has a pillar shape. However, the present invention is not limitedto the constitution, and the plurality of storing space may be locatedin the direction of axis. The plurality of storing space may also bethree-dimensionally located in the perpendicular direction and in thedirection of axis.

(6) In the above-described embodiment, the valve member actuator isdriven by fluid power. However, the valve member actuator may also bemanually driven.

(7) In the above-described embodiment, this invention is implemented asa valve. However, it may also be implemented as the state quantitysensor and/or the state controller. The state quantity sensor is a flowmeter or a thermometer, for example. The state controller is a pressurecontroller or a flow controller, for example. This invention isgenerally implemented as chemical fluid apparatus.

What is claimed is:
 1. A chemical liquid circuit apparatus comprising: amain circuit member having: a chemical liquid channel for flowing achemical fluid; and a main opening formed on an end of the chemicalliquid channel; a sub-circuit member mounted on and in contact with themain circuit member in an elastically deformed state the sub-circuitmember having a sealing surface for sealing the main opening fromoutside of the chemical liquid circuit apparatus; and a frame memberhaving: a storing portion for storing the main circuit member; and aconnecting opening disposed in a position connecting to the main openingof the main circuit member stored in the storing portion; a mountingportion on which the sub-circuit member is mounted; and an inner wallsurface in contact with the main circuit member on an opposite side ofthe mounting portion.
 2. The chemical liquid circuit apparatus of claim1, wherein the storing portion further includes: an insert opening forinserting the main circuit member along the inner wall surface so as toinstall the main circuit member in the storing portion.
 3. The chemicalliquid circuit apparatus of claim 1, wherein the main circuit memberincludes a valve body having a plurality of chemical liquid channels,and wherein the sub-circuit member includes a valve member actuatorhaving a valve member configured to switch channels by opening andblocking mutual communications between the plurality of chemical liquidchannels.
 4. The chemical liquid circuit apparatus of claim 3, whereinthe plurality of chemical liquid channels include: a first flow channel;a second flow channel; and a first valve member chamber provided in aposition for connecting the first flow channel and the second flowchannel, and wherein the valve member actuator includes: a first valvemember provided inside the first valve member chamber and configured toblock the communications between the first flow channel and the firstvalve member chamber by closing a first opening connected to the firstflow channel, the first opening being formed on an inner wall surface ofthe first valve member chamber; and a second valve member configured toblock the communications between the second flow channel and the firstvalve member chamber by closing a second opening connected to the secondflow channel, the second opening being formed in the inner wall surfaceof the first valve member chamber.
 5. The chemical liquid circuitapparatus of claim 4, wherein the second flow channel includes: a secondvalve member chamber; and a coupling flow channel for connecting thesecond valve member chamber and the second opening, wherein the firstvalve member is configured to perform opening/closing operations withinthe first valve member chamber, and wherein the second valve member isconfigured to perform opening/closing operations within the second valvemember chamber, the second valve member includes a contact portion whichcomes into contact with an inner surface of the second opening when thesecond valve member is inserted into the coupling flow channel.
 6. Thechemical liquid circuit apparatus of claim 5, comprising: a plurality ofsecond flow channels and a corresponding plurality of second valvemembers.
 7. The chemical liquid circuit apparatus of claim 5, whereinthe first valve member is a diaphragm valve member including: adiaphragm membrane portion having a circumferential edge portion fixedto the valve body; and a protruding portion provided in a center of thediaphragm membrane portion and configured to open and close the firstopening, and wherein the plurality of second flow channels are formedand disposed so as to have respective openings in an annular portionformed by partitioning by the diagraph membrane portion in the firstvalve member chamber.
 8. The chemical liquid circuit apparatus of claim1, wherein the sub-circuit member includes a state quantity sensorconfigured to sense a state quantity of the chemical fluid flowing inthe main opening.
 9. The chemical liquid circuit apparatus of claim 1,wherein the sub-circuit member includes a state controller configured tocontrol a state quantity of the chemical fluid flowing in the mainopening.
 10. The chemical liquid circuit apparatus of claim 1, whereinthe frame member includes a plurality of storing portions, each of theplurality of storing portions storing corresponding one of main circuitmembers, and wherein the sub-circuit member includes a joint channelconnecting the main openings of the main circuit members stored in thestoring portions.